Mass
|
14 kg (power unit) Hyper MF : 250 kg (main unit) Hyper MF-U : 255 kg (main unit) |
Model
|
Hyper MF-UD2515B |
Accuracy
|
(0.9+3L/1000)μm, L = XY axis measuring length (mm) when not loaded |
Data output
|
Via RS-232C interface |
Graduation
|
0,01µm |
Article Type
|
Product |
Optical tube
|
Reticle projection method, with TV mount, Optical path ratio Hyper MF : Monocular or binocular tube (optional depression : 25°) Hyper MF-U : Siedentoph type (pupil distance adjustment : 51 - 76 mm), 1X tube lens, Binocular tube (depression : 25°) |
Articlegroup
|
321 |
Dimensions (WxDxH)
|
160 x 476 x 381 mm (power unit) Hyper MF : 880 x 913 x 730 mm (main unit) Hyper MF-U : 880 x 913 x 770 mm (main unit) |
Observation type
|
Bright Field or Bright Field/Dark Field |
Observation image
|
Erect image |
Max. workpiece height
|
150 |
XY stage travel range
|
250 x 150 mm |
relevant for catalog
|
International |
Optional accessories
|
See MF accessories for Hyper MF or MF-U models |
Swiveling function (left)
|
±3˚ |